The World's First 20 Nm Chemical Particle Counter

The World's First 20 Nm Chemical Particle Counter

Press Release (ePRNews.com) - Boulder, CO - Jul 12, 2016 - ​Particle Measuring Systems (PMS) has released the world’s first and only 20 nm particle counter for high purity process chemicals. The Chem 20™ has particle size sensitivity of 20 nm with PSL and 9 nm with gold particles.

The Chem 20 enables semiconductor manufacturers to detect yield-limiting particles not possible with lesser technologies.

Brian Knollenberg, VP for Electronics

With PMS’s advanced laser optics and detector technology, this innovative new product detects very small particles not seen with legacy products. The Chem 20 features an on-board chemical flow meter and bubble detector to maximize data quality and protect sensor performance. In another industry first, Chem 20 is offered in two models optimized for low or high refractive index chemicals, greatly improving instrument performance and accuracy over existing technologies.

“The Chem 20 enables semiconductor manufacturers to detect yield-limiting particles not possible with lesser technologies“, said Brian Knollenberg, VP for Electronics at Particle Measuring Systems. He continued, “This helps them react quickly to particle excursions long before surface scan or yield data are available. With flexible installation options, Chem 20 can help our customers optimize chemical delivery systems from the loading dock to point-of-process, with improved sample population statistics for tighter process control limits.”

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Source : Particle Measuring Systems
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